The characteristics and uses of automatic trough cleaning machine

The characteristics and use of automatic groove cleaning machine - mega sound cleaning - mega sound cleaning - Shanghai Yangmi mega sound cleaning

Fully automatic slot cleaner is widely used in CMP post cleaning process in IC, MEMS and PV fields. The cleaning machine can clean the surface, back and edge of the wafer. The self-made megabonic cleaning technology can remove fine particle contaminants attached to the wafer surface, achieving efficient removal. Can provide multiple tanks of chemical liquid or pure water, combined with spraying, overflow, rapid cleaning and other cleaning methods, with advanced IPA drying method, can simultaneously correspond to 25 or 50 pieces of process processing.

      Product features

• Intelligent and accurate transmission control system
  

  
  

• Automatic Chemical Centralized Feed System (CDS)
  

  
  

• Overflow design, reduce the amount of liquid, reduce the cost of use
  

  
  

• Strong cleaning effect, cleaning rate ≥99%
  

  
  

• Extensible multi-combination cleaning process
  

  
  

• Particle control capacity, ≥0.1μm particles less than 15
  

  
  

• The liquid medicine tank adopts double tank design, which can realize accurate temperature control and prevent liquid medicine leakage
  

  
  

• Waste liquid exhaust independent control, effectively protect personnel operation
  

     Application field

     Integrated circuit, MEMS, PV, etc